AFM calibration standard

AFM XYZ Calibration Standards

affordable, quick and easy calibration of AFM systems

 

Introduction 

CS-20NG AFM calibration standard

Atomic Force Microscopy (AFM) has become a valuable tool for imaging and accurate measurements on the micrometer and nanometer scale. In order to validate the measuring capabilities, the AFM system need to be correctly calibrated. On this page you will find a selection of affordable and accurate AFM calibration standards for Z-axis and  X-Y-axis  calibration; the HS series and the CS series.

The HS series with 20nm, 100nm and 500nm calibrated Z height also offer X – Y calibration for larger scanners in the 40-100µm range.

The CS calibration standard with 20nm Z height also enables X- Y-axis calibration at a smaller scanner size in the µm range.

The AFM calibration standard structures are all fabricated on a Si chip which is mounted on a 12mm stainless steel AFM disc with electrically conductive epoxy resin.



AFM calibration standards specifications table

Calibration Standard

HS-20MG

HS-100MG

HS-500MG

CS-20NG

Product #

AU-34-030020

AU-34-030100

AU-34-030500

AU-34-032020

Height (Z)

20nm

100nm

500nm

20nm

X-Pitch

10µm, 5µm

10µm, 5µm

10µm, 5µm

10µm, 5µm, 500nm

Y-Pitch

10µm, 5µm

10µm, 5µm

10µm, 5µm

10µm, 5µm, 500nm

10µm pitch structure
5µm pitch structure

500nm pitch

Square holes / pillars
Round holes, pillars & lines
-

Square holes / pillars
Round holes, pillars & lines
-

Square holes / pillars
Round holes, pillars & lines
-

Square holes / pillars
Round holes, pillars & lines
Round holes

10µm pitch area
5µm pitch area
500nm pitch area

1x1mm
500x500µm
-

1x1mm
500x500µm
-

1x1mm
500x500µm
-

1x1mm
500x500µm
100x100µm

Die size

5x5mm

5x5mm

5x5mm

5x5mm

Construction

SiO2 on Si

SiO2 on Si

SiO2 on Si

SiO2 on Si

Mounted

12mm AFM disc

12mm AFM disc

12mm AFM disc

12mm AFM disc

 

 

4 Item(s)

4 Item(s)