Individual Graticules

Micro-Tec Individual Graticule Calibration Standards

ideal for low magnifications, large areas, microscope stages and digital imaging systems

Introduction

The new and innovative Micro-Tec individual graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Cr lines. They are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec graticule calibration standards provide high contrast images for ease of calibration. Each of the calibration standards has a unique product ID and serial number etched on the die. Each of the Micro-Tec graticule calibration standard is fully NIST traceable and are supplied with a certificate of traceability.  The Micro-Tec graticule calibration standards are ideally suited for:

  • reflective light microscopes
  • stereo microscopes
  • optical magnifiers
  • low magnification SEM
  • digital imaging systems
  • quality control measurements

The Micro-Tec family of silicon based graticules for bright-field applications consists of:

  • CCS-1       1mm cross scale pattern with 0.01mm divisions
  • CCS-5       5mm cross scale pattern with 0.01mm divisions
  • CCS-10    10mm cross scale pattern with 0.01mm divisions
  • LCS-10     10mm compound linear scale with 1.0, 0.1 and 0.01mm divisions
  • CCS-2.5   1 inch cross scale pattern with 0.001inch divisions

CCS-5 5mm cross scale, 0.01mm div., Si/Cr, opaque31-T33200   CCS-5 5mm cross scale, 0.01mm div., Si/Cr, opaque

The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns.

General specifications for  all Micro-Tec graticule standards:

Substrate  525µm thick boron doped ultra-flat wafer with <100> orientation
Conductive Excellent, 5-10 Ohm resistivity
Lines

75nm thick, 5.0µm wide pure Chromium lines

Identification Product ID with serial number etched
Mounting Unmounted standard
Supplied Supplied in a Gel-Pak box


Specifications for the individual Micro-Tec graticule calibration standards :

Product #

Name

Pattern size

Units / Div

Die size

Traceable

Mounting

AU-31-T33100

Micro-Tec CCS-1

1mm cross

0.01mm

3.5x3.5mm

Yes, NIST

Optional

AU-31-T33200

Micro-Tec CCS-5

5mm cross

0.01mm

6.0x6.0mm

Yes, NIST

 

AU-31-T33300

Micro-Tec CCS-10

10mm cross

0.01mm

12.0x12.0mm

Yes, NIST

 

AU-31-T33400

Micro-Tec LCS-10

10mm long

1.0/0.1/0.01mm

6.0x12.0mm

Yes, NIST

 

AU-31-T33500

Micro-Tec CCS-2.5

1 inch cross

0.001inch

3.5x3.5mm

Yes, NIST

 

--> An alternative calibration standard is the MTC-5 multiple target calibration standards with cross scale pattern, circles, squares and hexagons. Covers both magnification calibration and images distortion assessments. Available for both brightfield and darkfield applications.

5 Item(s)

5 Item(s)