Wafer holders

EM-Tec wafer holders for SEM

compatible with either wafers with a flat or with a notch

EM-Tec wafer holders with pin   |   EM-Tec with wafer holders M4

Introduction 

EM-Tec wafer holders for SEM

The EM-Tec wafer holders are specially designed to hold semi-conductor wafer in sizes of 100mm, 150mm and 200mm diameter (4 inch, 6 inch and 8 inch). They are compatible with wafers with either a flat or with a notch. The unique locking slide is adjustable to cope with non-standard wafers.

Unique features of the EM-Tec wafer holders:

  1. low profile, weigth balanced support disc
  2. square cut-outs for wafer tweezers
  3. adjustable spring tension
  4. adjustable for non-standard wafers
  5. self lubricating locking slide
  6. compatible with either wafers with a notch or wafers with a flat
  7. compatible with EM-Tec stage adapters for all SEM platforms

Available with:

  • standard pin to fit on SEMs which use the standard pin; FEI, Philips, Zeiss, LEO, Leica, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, CamScan, ETEC and Novascan SEMs.
  • M4 threaded hole; compatible with Hitachi SEMs, FESEMs and table top SEMs and with the EM-Tec versatile SEM stage adapters

Capacity and dimensions for the  EM-Tec wafer holders:

Product #

Type

Wafer sizes

Dimensions w/o pin

Securing methode

SEM stage comp.

AU-12-000284

W4

100mm / 4”

Ø106x16mm

Springloaded slide

Standard 3.2mm pin

AU-12-000384

W4

100mm / 4”

Ø106x16mm

Springloaded slide

M4 thread

AU-12-000286

W6

150/mm / 6”

Ø156x16mm

Springloaded slide

Standard 3.2mm pin

AU-12-000386

W6

150mm / 6”

Ø156x16mm

Springloaded slide

M4 thread

AU-12-000288

W8

200mm / 8”

Ø206x16mm

Springloaded slide

Standard 3.2mm pin

AU-12-000388

W8

200mm / 8”

Ø206x16mm

Springloaded slide

M4 thread


Ordering Information for EM-Tec wafer holders for SEMs using pin stubs; FEI, Philips, Zeiss, LEO, Tescan, Aspex, RJLee, AmRay, Cambridge Instruments, Leica, CamScan, Aspex, ETEC and Novascan SEMs.

8 Item(s)

8 Item(s)