Micro-Tec MTC-5 Multiple Target Graticule Calibration Standards
combines calibration and imaging quality assessment in a single standard
Introduction The new and innovative Micro-Tec MTC-5 multiple target graticule calibration standards have been designed using an ultra-flat conductive silicon substrate with corrosion resistant Chromium lines. The precise patterns are manufactured utilizing the latest semiconductor manufacturing techniques. The Micro-Tec multi target graticules provide bright and rich contrast images for ease of calibration. Intended for use with reflective light imaging, optical quality control systems and low magnification SEM imaging for:
There are four distinct patterns on the MTC-5 calibration standard:
The deposited Cr lines are in the same focus plane as the substrate, better defined and provide more signal than etched patterns. They are also less prone to accumulate dust particles in the patterns. Each of the calibration standards has a unique product ID serial number etched on the die. The Micro-Tec MTC-5 calibration standards are NIST traceable; a wafer level certificate of tracebility is supplied with each standard. The MTC-5 is available in two versions:
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AU-31-T33600 Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, Bright Field |
Specifications for the Micro-Tec MTC-5 multiple target calibrating graticule standards:
Substrate | 525µm thick boron doped ultra-flat wafer with <100> orientation |
Conductive | Excellent; 5-10 Ohm resistivity |
Patterns | Circles, squares, hexagons, cross scale |
Pattern size | 5 x 5mm (4x) |
Lines | 75nm thick, pure bright Chromium lines 5µm wide lines spaced 10, 25, 50, 75, 100, 125 and 150µum apart 10µm wide lines, spaced 200, 250, 300, 350, 400, 500, 600, 700, 800 and 900µm apart 20µm wide lines spaced 1.0, 1.5, 2, 2.5, 3, 3.5, 4, 4.5 and 5mm apart |
Cross scale pattern |
5mm wide lines, 5 x 5mm with 0.01mm divisions |
Die size | 12 x 12mm |
Application | Reflective light, scanning electron microscopy, optical imaging systems |
Identification | Product ID with serial number etched |
Mounting | Unmounted, mounting optionally available |
Supplied | Supplied in a Gel-Pak box |
MTC-5 Multiple Targets
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Micro-Tec MTC-5 Multiple target calibration standard with 4 patterns, unmountedSKU: AU-31-T33600Units Per Package: 1From: $348.44
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Micro-Tec MTCD-5 Multiple target calibration standard with 4 patterns, unmountedSKU: AU-31-T33700Units Per Package: 1From: $348.44