EM-Tec silicon SEM finder grid substrate 
144 individual, indexed fields for multiple samples and correlative microscopy

Introduction EM-Tec silicon SEM finder grid substrate

The novel EM-Tec FG1 silicon SEM finder grid substrate consists of an a 12x12mm chrome deposited grid with a 1mm pitch on a conductive ultra-flat silicon substrate. The substrate is divided into 144 indexed fields of 1x1mm where each of the fields has a unique alphanumeric label in the lower right corner.  The alphanumeric label is easy to see with a magnifier, stereo microscope and/or SEM.  The grid produced is comparable with 25 mesh and is practical for larger particles or small samples mounted on the substrate in separate fields. The EM-Tec FG1 silicon SEM finder grid substrate is ideal for correlative microscopy since the position of the sample is easily located. Size of the EM-Tec FG1 is 12x12mm on a 12.5 x 12.5mm substrate. Primarily designed for SEM applications, but equally suitable for reflected light microscopy, AFM and Auger/SIMS.
This unique product has a number of advantages over engraved SEM stubs and the usual copper SEM finder grids:

  • Ultra-flat – no height differences such as with copper finder grids
  • Pattern is easily visible with unaided eye, SEM and light microscope
  • Each individual field indexed with an alphanumeric label
  • Low background signal for SEM imaging – similar to Si chips
  • Fine bright pattern over entire area – finer than engraved stubs
  • Sample size can be easily judged with the 1x1mm pattern in the background
  • Compatible with Ø12.7mm pin stubs, Ø12.2mm JEOL stubs and Ø15mm Hitachi stubs
  • Easy to mount on SEM and AFM stubs
  • Compatible with SEM, FIB, AFM, LM, XPS/ESCA, SIMS and Auger
  • Reusable – solvent resistant and plasma cleaning compatible

The EM-Tec FG1 silicon SEM finder grid substrate in packaged in a clean-room and shipped in a gel-box.

The EM-Tec FG1 finder grid is ideal for:

  • correlative, corroborative, collaborative and repetitive microscopy
  • multi-sample mounting for small samples
  • demonstration samples with quick finder grid
  • quick size estimation with the 1mm grid


Specifications of the pattern and the ultra-flat silicon wafer of the EM-Tec FG1 silicon finder grid:

Pattern size   12 x12 mm divided into 144 individual 1x1mm fields
Numbering  Each field has unique alphanumeric label in lowe right corner
Pattern/labels 75nm thick deposited Cr with 20µm line width, 80µm label height 
Substrate size 12.5x12.5mm
Orientation <100>
Type P (Boron)
Resistance 1-10 Ohm/cm
Grade Prime / CZ Virgin
Coating None, native oxide only
Thickness 675µm (+/- 20µm)
TTV ≤1.5µm
Warp ≤30µm

Technical Support Bulletin: EM-Tec FG1 silicon SEM finder grid substrate

Silicon Finder Grid

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